摘要
TheapproachofutilizingcombustionsynthesistomakefineparticlesofSiO2,Al2O3andTiO2isaquitemoderntechnology.Throughthechemicalreactioninpost-flameregion,fineSiO2particlescanbeformedwithhighpurityonplatesurface.Therefore,thecombustionsynthesisofSiO2powdersisanimportantareaforfurtherresearchanddevelopment,especiallyfortheapplicationofSiO2inthesemiconductorindustry.Thisinvestigationproposesanexperimentalapproach(i.e.,agas-phasecombustionsynthesis)usingtwodifferentkindsoforganiccompounds,Hexamethyldisilazane(HMDSA)andHexamethyldisioxane(HMDSO),asthesiliconprecursors.ApremixedgasburnerischosenwithC3H8asfuel,airasoxidantandpartoftheairwasusedasthecarryinggastoentrainHMDSA/HMDSOvaporintothecombustiblemixture.ObservationsshowthattheC3H8/airflamechangedcolorfromapale-blueflametolightyellowandthenorangewhendifferentamountsofprecursorswereintroduced.Throughthechemicalreactioninthepost-flameregion,fineSiO2particleswereformedinthegasphaseandthenquenchedandcollectedonanaluminumflatplate.TheobjectiveofthispaperistostudytheeffectsofHMDSOandHMDSAconcentrationsandflametemperaturesonthesynthesisofSiO2particles.
出版日期
2001年01月11日（中国期刊网平台首次上网日期，不代表论文的发表时间）
