REQUIREMENT OF SILICON FLATNESS FOR SILICON DIRECT BONDING TECHNOLOGY-中国期刊网

摘要 Theinfluenceofsiliconsliceflatnessonbondingtechnologyandtherelationbetweenaforeignparticleandresultingbubblearequantitativelypresentedbytheelastictheory.ItisdemonstratedexperimentallybyX-raydoublecrystaldiffractometryandinfraredimager.

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REQUIREMENT OF SILICON FLATNESS FOR SILICON DIRECT BONDING TECHNOLOGY

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REQUIREMENT OF SILICON FLATNESS FOR SILICON DIRECT BONDING TECHNOLOGY

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