简介：Micro-structures3-Dprofilemeasurementisanimportantmeasurementcontentforresearchonmicro-machiningandcharacterizationofmicro-dimension.Inthispaper,anewmethodinvolved2-Dstructuretemplate,whichguidesphaseunwrapping,isproposedbasedonphase-shiftingmicroscopicinterferometry.Itisfitnotonlyforstaticmeasurement,butalsofordynamicmeasurement,especiallyformotionofMEMSdevices.3-Dprofileofactivecombofmicro-resonatorisobtainedbyusingthemethod.Thetheoreticprecisioninout-of-planedirectionisbetterthan0.5nm.Thein-planetheoreticprecisioninmicro-structuresisbetterthan0.5μm.Butattheedgeofmicro-structures,itisonthelevelofmicrometermainlycausedbyimpreciseedgeanalysis.Finally,itsdisadvantagesandthefollowingdevelopmentarediscussed.