Thenumericalmoirémethodwithsensitivityashighas0.03nmhasbeenpresented.Aquantitativedisplacementandstrainanalysisprogramhasbeenproposedbyusingthismethod.Itisappliedtoauedgedislocationandastackingfaultinaluminum.ThemeasuredstrainofedgedislocationiscomparedwiththeoreticalpredictiongivenbyPeierls-Nabarrodislocationmodel.Thedisplacementofstackingfaultisalsoobtained.