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2 个结果
  • 简介:Anovelread-onlysuper-resolutionopticaldiscstructure(substrate/masklayer/dielectriclayer)ispropsedinthispaper.ByusingaSithinfilmasthemasklayer,therecordingpitswithadiameter380nmandadepth50nmarereadoutonthedynamicmeasuringequipment;thelaserwavelengthλis632.8nmandthenumericalapertureis0.40.IntheoftheSithinfilmis18nmandthesignal-to-noiseratiois32dB.

  • 标签: 光存储盘 硅薄膜 超分辨率